In-depth treatment of FinFET (Trigate) CMOS for 22-nm nodes and beyond, as well as nanoscale CMOS practiced at the 45-nm node.
The balance between anisotropy and selectivity is covered brilliantly. The PDF includes updated recipes for plasma etching of high-k dielectrics and metals like copper and tungsten.
Fabrication Engineering At The Micro- And Nanoscale 4th Pdf Access
In-depth treatment of FinFET (Trigate) CMOS for 22-nm nodes and beyond, as well as nanoscale CMOS practiced at the 45-nm node.
The balance between anisotropy and selectivity is covered brilliantly. The PDF includes updated recipes for plasma etching of high-k dielectrics and metals like copper and tungsten.